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机译:在C2H5OH / Ar等离子体中各向异性刻蚀CoFeB磁性薄膜
Inha Univ, Ctr Design & Applicat Mol Catalysts, Dept Chem & Chem Engn, 100 Inharo, Incheon 22212, South Korea;
Inha Univ, Ctr Design & Applicat Mol Catalysts, Dept Chem & Chem Engn, 100 Inharo, Incheon 22212, South Korea;
Inha Univ, Ctr Design & Applicat Mol Catalysts, Dept Chem & Chem Engn, 100 Inharo, Incheon 22212, South Korea;
Inha Univ, Ctr Design & Applicat Mol Catalysts, Dept Chem & Chem Engn, 100 Inharo, Incheon 22212, South Korea;
Inha Univ, Ctr Design & Applicat Mol Catalysts, Dept Chem & Chem Engn, 100 Inharo, Incheon 22212, South Korea;
Inha Univ, Ctr Design & Applicat Mol Catalysts, Dept Chem & Chem Engn, 100 Inharo, Incheon 22212, South Korea;
Cobalt iron boron; Thin films; Inductively coupled plasma reactive ion etching; Ethanol; Magnetic random access memory;
机译:在CH3OH / Ar,C2H5OH / Ar,CH4 / Ar和CH4 / O-2 / Ar气体混合物的高密度等离子体中干蚀刻钯薄膜
机译:CH_4 / Ar等离子体对CoFeB磁性薄膜的高密度等离子体反应离子刻蚀
机译:CH3COOH / Ar气体混合物中CoFeB磁性薄膜的电感耦合等离子体反应离子刻蚀
机译:Cl_2 / C_2F_6 / Ar和HBr / Ar等离子体中Pb(Zr_xTi_(1-x)O_3薄膜的感应耦合等离子体刻蚀
机译:基于八氟环丁烷的等离子放电的特征,用于二氧化硅和低K介电薄膜的选择性刻蚀和处理。
机译:倾斜沉积CoFeB薄膜中从S到X波段的可调零场铁磁共振频率
机译:高温反应离子刻蚀CF4 / O2 /空气等离子体中铝掩模的铱薄膜