Optical properties of radio-frequency magnetron sputtered a-(Cr_(1-x)Al_x)_2O_3 thin films grown on a-Al_2O_3 substrates at different temperatures

摘要

We report the optical properties of the (Cr1-xAlx)2O3thin films (0.08 ≤ x ≤ 0.16) with a thickness of ~300 nm grown onc-plane (0001) α-Al2O3substrates at different temperatures (i.e. room temperature, 320 °C and 400 °C) by non-reactive radio-frequency magnetron sputtering. (0001) oriented single-phase corundum structured crystalline thin films were grown at temperatures of 320 °C and 400 °C, while the films deposited at room temperature are amorphous. The stoichiometric composition of the films was analyzed and verified by electron probe micro-analyses. The phase composition and lattice parametercwere characterized by X-ray diffraction in Bragg-Brentano geometry. The crystal quality increases with increasing the deposition temperature independent of the film composition, and the lattice constantcincreases with decreasing the Al concentration which is independent of the deposition temperature. Raman spectra supported the interpretation of phase composition analysis and showed a significant shift of phonon frequency with Al concentration and the substrate temperature. Infrared reflection absorption spectroscopy of the films was carried out to determine the absorption band shifts in relation to the lattice parametercwhich the smaller lattice constantcthe larger frequency of the Eumode. Further, the band gap of the thin films was calculated from visible light absorption spectra.