Radio-frequency plasma-enhanced chemical vapour deposition of carbon films on AISI 316LVM steel: Formation of a transition layer and metal whiskers, and their influence on coating properties

摘要

The process parameters for carbon coating synthesis can affect the entire zone of modification, including the coating itself and the transition layer close to the surface of the metal substrate. In this study, diamond-like carbon (DLC) coatings were synthesised using the radio frequency plasma-enhanced chemical vapour deposition method with a variable negative potential of the electrode called self-bias (Vb) that affects the temperature of the process. Three types of modification were distinguished according to the thickness and properties of the modification zone.