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Smooth epitaxial copper film on sapphire surface suitable for high quality graphene growth

机译:蓝宝石表面光滑的外延铜膜,适合高质量石墨烯生长

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摘要

Graphene, a two-dimensional material, can be grown on a metal substrate using chemical vapor deposition - this growth process is notably influenced by the crystal orientation and the roughness of the substrate surface. We prepared epitaxial Cu(111) films on sapphire substrates using thermal evaporation at various substrate temperatures and studied their crystal orientation and roughness. The well crystallized Cu(111) film with a smooth surface was obtained when the substrate was maintained at 473 K during the deposition. High quality graphene with few intrinsic defects was grown on this Cu film.
机译:石墨烯是一种二维材料,可以使用化学气相沉积法在金属基板上生长-该生长过程特别受基板的晶体取向和粗糙度影响。我们在各种衬底温度下使用热蒸发在蓝宝石衬底上制备了外延Cu(111)膜,并研究了它们的晶体取向和粗糙度。当在沉积过程中将基板保持在473 K时,可获得结晶良好的表面光滑的Cu(111)膜。在此铜膜上生长了具有很少固有缺陷的高质量石墨烯。

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