Study of ZrO_2 thin films deposited at glancing angle by radio frequency magnetron sputtering under varying substrate rotation

摘要

In present work, structural, morphological and optical properties of glancing angle deposited (GLAD similar to 82 degrees) ZrO2 thin films by RF magnetron sputtering at different substrate rotation (omega) have been investigated and compared with normally deposited (ND similar to 0 degrees) ZrO2 films. Both GLAD and ND ZrO2 films exhibit preferential structural growth of monoclinic phase oriented in different directions. GLAD films also depict a tetragonal peak which has been attributed to the presence of fine nano-crystallite size (similar to 13 nm). Surface correlation length of such films decreases with the increase in omega. The decrease has been attributed to the change in columnar microstructure with omega. RMS roughness values for GLAD and ND ZrO2 films are 4.6-5.1 nm and 1 nm, respectively. Dominant atomic shadowing is responsible for high roughness of GLAD films. Refractive index derived from ellipsometric measurements manifests a decreasing trend with parameter, omega. The trend has also been explained in terms of varying columnar micro-structure. Refractive index for GLAD ZrO2 films varies from 1.901 and 2.011 on varying omega from 0.50 to 4 rpm. ND ZrO2 film exhibits refractive index value of 2.178 which is substantially greater than that of GLAD films. Lowering in refractive index of GLAD films has been attributed to dominant atomic shadowing at glancing angles. Residual stress switches from large compressive to small tensile as the deposition angle changes from 0 degrees to 82 degrees. For GLAD films, tensile stress increases with the increase in omega except for the film deposited at the highest substrate rotation. Lowering in stress for GLAD films compared to ND films and trend of stress with omega have been explained in terms of varying inter-molecular forces with inter-columnar distance.