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The effect of deposition rate and thermal annealing on morphology and microstructural evolution of Nickel-Bismuth thin film

机译:沉积速率和热退火对镍铋薄膜形貌和微观结构演变的影响

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Bismuth/Nickel thin films were deposited on borosilicate glass substrates using an electron beam evaporator equipped with thickness monitor. Thin film of Bi (10 nm) was deposited on top of pre-deposited Ni (10 nm) film at 0.6 and 1.8 A/second deposition rates. The samples were then annealed at temperatures between 60 degrees C and 260 degrees C for 1 to 5 h under vacuum of similar to 1 x10(-6) mbar. Scanning electron microscopy was used to investigate surface morphology. Scanning electron microscopy images depicted islands at all temperatures including the asdeposited sample. High resolution transmission electron microscopy reveals highly crystalline film and nanowires with energy dispersive x-ray spectroscopy showing that the film and nanowires were formed by Bi and Ni elements with oxygen as impurity. Rutherford backscattering spectrometry revealed intermixing of layers at the interface. Furthermore, spontaneous formation of NiBi3 and NiBi stoichiometry was observed attributed to reaction-diffusion mechanism during deposition. X-ray diffraction revealed structural transformation of the films from amorphous (as-deposited) to polycrystalline hexagonal beta-NiBi crystal structure at 60 degrees C to 200 degrees C. X-ray diffraction pattern also revealed hexagonal crystal lattice with preferential growth orientation along the [1 0 1] plane with other supported planes [0 0 2], [1 0 2], [1 1 0] and [1 0 3]. The results pointed toward successful utilization of this approach to prepare templates for the synthesis of well controlled, vertically aligned and well distributed crystalline nanowires of Ni-Bi binary system more relevant to the industrial application.
机译:使用配备厚度监测仪的电子束蒸发仪,将铋/镍薄膜沉积在硼硅酸盐玻璃基板上。 Bi(10 nm)薄膜以0.6和1.8 A /秒的沉积速率沉积在预沉积的Ni(10 nm)膜的顶部。然后,在类似于1 x10(-6)mbar的真空下,将样品在60摄氏度至260摄氏度之间的温度下退火1至5小时。扫描电子显微镜用于研究表面形态。扫描电子显微镜图像描绘了在所有温度下的岛,包括沉积的样品。高分辨率透射电子显微镜通过能量色散X射线光谱法揭示了高度结晶的薄膜和纳米线,表明该薄膜和纳米线是由Bi和Ni元素以及氧作为杂质形成的。卢瑟福反向散射光谱法揭示了界面处各层的混合。此外,观察到NiBi3的自发形成和化学计量的NiBi归因于沉积过程中的反应扩散机理。 X射线衍射揭示了薄膜的结构在60摄氏度至200摄氏度之间从非晶态(沉积态)转变为多晶六方β-NiBi晶体结构。X射线衍射图还显示出六方晶格具有沿晶格优先生长的方向[1 0 1]平面以及其他受支持的平面[0 0 2],[1 0 2],[1 1 0]和[1 0 3]。结果表明成功利用该方法制备了模板,用于合成与工业应用更相关的Ni-Bi二元体系的可控,垂直排列和分布良好的晶体纳米线。

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