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机译:低温磁控溅射沉积均匀高质量Al掺杂ZnO薄膜的结构
Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China;
Bengbu Design & Res Inst Glass Ind, State Key Lab Adv Technol Float Glass, Bengbu 233018, Anhui, Peoples R China;
Bengbu Design & Res Inst Glass Ind, State Key Lab Adv Technol Float Glass, Bengbu 233018, Anhui, Peoples R China;
Bengbu Design & Res Inst Glass Ind, State Key Lab Adv Technol Float Glass, Bengbu 233018, Anhui, Peoples R China;
Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China;
Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China;
机译:高温沉积高透明和通过RF磁控溅射进行Al掺杂的ZnO膜
机译:室温下Ar + H_2环境下射频磁控溅射沉积Al掺杂ZnO薄膜的溅射参数优化
机译:快速热退火后室温下无反应直流磁控溅射Al掺杂ZnO薄膜的组织和性能
机译:RF磁控溅射溅射压力沉积抗氮锌薄膜性能研究
机译:交流磁控溅射在低温下沉积的生物相容性氧化铝膜的性能。
机译:射频直流和射频叠加直流磁控溅射沉积的透明导电掺铝ZnO多晶薄膜的载流子输运和晶体学取向特征
机译:通过反应高功率脉冲磁控溅射均匀,高度透明和导电Al掺杂ZnO膜的室温沉积