TRIAL OF DIAMOND SYNTHESIS WITH HIGH-GROWTH RATE BY DC PLASMA CVD USING A DIAMOND CATHODE

TOSHIHIDE MIKAMI; YUTAKA ISHIKAWA; HIROSHI YAMANAKA

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TRIAL OF DIAMOND SYNTHESIS WITH HIGH-GROWTH RATE BY DC PLASMA CVD USING A DIAMOND CATHODE

机译：用金刚石阴极直流等离子体化学气相沉积法高速率合成金刚石的尝试

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来源
《表面技術》 |1999年第7期| 70-71| 共2页
作者
TOSHIHIDE MIKAMI; YUTAKA ISHIKAWA; HIROSHI YAMANAKA;
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收录信息
原文格式 PDF
正文语种 jpn
中图分类金属腐蚀与保护、金属表面处理 ;
关键词
Diamond; Diamond Films; DC Plasma; Low Temperature Cathode;

机译：钻石;金刚石膜;直流等离子体低温阴极;

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专利

1. Synthesis of boron-doped diamond films by DC plasma CVD using a CH4+CO2+H-2 gas mixture at lower substrate temperature and formation of an n-Si/p-diamond heterojunction [J] . Saha P., Kundoo S., Baneriee AN., Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2003 ,第2期

机译：在较低的基板温度下使用CH4 + CO2 + H-2气体混合物通过DC等离子体CVD合成硼掺杂的金刚石薄膜，并形成n-Si / p金刚石异质结
2. Deposition of diamond/β-SiC/cobalt silicide composite interlayers to improve adhesion of diamond coating on WC-Co substrates by DC-Plasma Assisted HFCVD [J] . Wang T., Xiang L., Shi W., Surface & Coatings Technology . 2011 ,第8a9期

机译：沉积DC /等离子辅助HFCVD沉积金刚石/β-SiC/硅化钴复合中间层以提高WC-Co基体上金刚石涂层的附着力
3. The large area deposition of diamond by the multi-cathode direct current plasma assisted chemical vapor deposition (DC PACVD) method [J] . Jae-Kap Lee, Kwang Yong Eun, Young-Joon Baik, Diamond and Related Materials . 2002 ,第3a6期

机译：多阴极直流等离子体辅助化学气相沉积（DC PACVD）方法大面积沉积金刚石
4. Diamond Films Synthesis with a DC Arc Plasma Jet: Effect of substrate Temperature on Quality of Diamond Films [C] . Rongfa Chen, Lianggang Dai, Rui Zhu, Conference on Application of Diamond and Related Materials in China . 2011

机译：金刚石薄膜用直流电弧等离子体喷射合成：衬底温度对金刚石薄膜质量的影响
5. Investigation of microwave cavity applicators for plasma assisted CVD diamond synthesis and plasma assisted combustion. [D] . Hemawan, Kadek Wardika. 2010

机译：用于等离子体辅助CVD金刚石合成和等离子体辅助燃烧的微波腔施加器的研究。
6. Novel Diamond Films Synthesis Strategy: Methanol and Argon Atmosphere by Microwave Plasma CVD Method Without Hydrogen [O] . Li Yang, Caiyi Jiang, Shenghui Guo, 2016

机译：新型金刚石薄膜合成策略：无氢的微波等离子体CVD法制备甲醇和氩气氛
7. Trial of Diamond Synthesis with High-Growth Rate by DC Plasma CVD Using a Diamond Cathode. [O] . Toshihide MIKAMI, Yutaka ISHIKAWA, Hiroshi YAMANAKA, 1999

机译：使用金刚石阴极的DC等离子体CVD试验金刚石合成的高增长速率。
8. Synthesis of Diamond in High Power-Density Microwave Methane/Hydrogen/ Oxygen Plasmas at Elevated Substrate Temperatures [R] . Chein, T. , Wei, J. , Tzeng, Y. 1999

机译：高功率密度微波甲烷/氢/氧等离子体在高温下合成金刚石

TRIAL OF DIAMOND SYNTHESIS WITH HIGH-GROWTH RATE BY DC PLASMA CVD USING A DIAMOND CATHODE

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