Surface patterning of SrTiO_3 by 30 keV ion irradiation

摘要

Strontium titanate single crystals are irradiated by using a focused ion beam microscope working with 30 keV gallium ions. Depending on the dose we found different stages of modification at the crystal surface. The topography of the exposed regions is investigated by atomic force microscopy. It is observed that the surface structure strongly depends on the dose of gallium ions.