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Local structure determination in strained-layer semiconductors

机译:应变层半导体中的局部结构确定

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摘要

The theory of elasticity accurately describes the deformations of macroscopic bodies under the action of applied stress. In this review, we examine the internal mechanisms of elasticity for strained-layer semiconductor heterostructures. In particular, we present extended x-ray-absorption fine structure (EXAFS) and x-ray diffraction (XRD) measurements to show how the bond lengths and bond angles in semiconductor thin-alloy films change with strain when they are grown coherently on substrates with different lattice constants. The structural distortions measured by experiment are compared to valence-force field (VFF) calculations and other theoretical models. Atomic switching and interfacial strain at buried interfaces are also discussed.
机译:弹性理论准确地描述了宏观物体在施加应力作用下的变形。在这篇综述中,我们研究了应变层半导体异质结构的内部弹性机制。特别是,我们提出了扩展的X射线吸收精细结构(EXAFS)和X射线衍射(XRD)测量,以显示当半导体薄合金膜在基底上一致地生长时,半导体合金膜的键长和键角如何随应变而变化。具有不同的晶格常数。将通过实验测量的结构变形与价力场(VFF)计算和其他理论模型进行比较。还讨论了埋藏界面的原子转换和界面应变。

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  • 来源
    《Surface Science Reports》 |2014年第1期|38-53|共16页
  • 作者

    Joseph C. Woicik;

  • 作者单位

    Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA;

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  • 正文语种 eng
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