An automation route to upgrading fabs toward 300mm

摘要

Today's wafer fab automation capabilities, particularly those associated with minienvironments, enable competitive upgrading of existing facilities. Indeed, in a number of cases, a minienvironment-based fab upgrade strategy has proven to be a low-risk means to improve the performance of an existing facility. This approach is a viable alternative to a new facility that still keeps semiconductor manufacturers on a route to an eventual 300mm fab.