Part Ⅰ—Technology How to make a sensor smarter

摘要

Typical wafer fabs take advantage of only a small portion of the information contained in the large quantity of metrology data that they generate. By looking at the behavior and interaction of parameters over time in new ways, much more real-time information about the process and equipment can be derived. Part 1 of this article reviews some of these tools, which can be used to improve processes and productivity.