So many options, so little time: Why optics is forever in lithography

摘要

More than 450 semiconductor professionals paid $150 each to attend the official release of the 1999 International Technology Roadmap for Semiconductors (ITRS) in Tokyo last November. Expectations were high that it would chart the future of lithography more accurately than previous Roadmaps. Unfortunately, however, it actually provides lithography engineers and vendors with a less than precise picture of the future.