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Safety solutions for high-pressure gas cylinders

机译:高压气瓶的安全解决方案

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摘要

Since the early 1960s, the use of high-pressure, specialty gases in semiconductor manufacturing has significantly contributed to the rapid evolution of integrated circuit technology. Compressed gas cylinders typically contain pressures up to 2500 psig. The potential energy controlled by these cylinders is a function of fill pressure and gas reactivity. This combination has led to specialty gas cylinders often being referred to as "a sleeping giant."
机译:自1960年代初以来,在半导体制造中使用高压特种气体为集成电路技术的快速发展做出了重要贡献。压缩气瓶通常承受的压力高达2500 psig。这些气缸控制的势能是填充压力和气体反应性的函数。这种结合导致特种气瓶经常被称为“沉睡的巨人”。

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