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Thin film PVD and strategies for optimized UHV-XHV pumping

机译:薄膜PVD和优化UHV-XHV抽运的策略

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摘要

The vacuum performance of any processing tool is critically determined by a number of factors, including the design of the processing chambers, the selection, configuration and operating techniques for pumping and, of course, the process itself. The very nature of the processing environment conspires to shield us from vital knowledge of what is going on. All too often, the "horsepower race" of relatively meaningless conventional vacuum system specifications has inhibited progress.
机译:任何处理工具的真空性能都由许多因素决定,这些因素包括处理室的设计,泵的选择,配置和操作技术,当然还有过程本身。处理环境的本质使我们无法了解正在发生的事情。相对而言,相对无用的常规真空系统规格的“马力竞赛”经常阻碍了进展。

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