Asuka project to select tools this year

摘要

It looks like suppliers already working with Selete will have the advantage in getting their tools into a fab now being planned for Japan's new research consortium's fab. The Asuka Project researchers plan to start selecting tools this year to install in the government's new 300mm research fab in Tsukuba in the first half of 2002. The line will be used to develop EUV, EPL, and mask technology, a transistor module with a gate stack using a new high-k material, and an interconnect module using copper and a new low-k dielectric. Researchers want to collaborate with mate- rials and equipment suppliers on developing process technology and improving tools for the l00nm and 70nm nodes.