Ebara steps up technology development, plans US push

摘要

Abrasive-free slurries. Fixed abrasives. Web-type platforms. Upside down tools. Now there is yet another new approach to the nagging problem of high cost of ownership and less than perfect performance of CMP tools. Japan's big CMP supplier, Ebara Corp., expects to introduce a new bonded-abrasive pad that can be retrofitted onto a standard rotary tool later this year. Ebara has held onto its number two position in the CMP market mainly on its equipment's workhorse reliability.