Factors in determining COO for 300mm Foups

摘要

When analyzing 300mm FOUP costs, new fabs must go well beyond the initial purchase price. They must also consider various factors in carrier lifetime, utilization, maintenance, and spare parts in cost of ownership calculations. The various FOUPs available today are manufactured to different designs, from different materials, and for different levels of performance. All of these factor into the cost of maintaining and operating a given FOUP over its lifetime.