Chemistry and treatment of of III-V semiconductor wastewater

摘要

Viable treatment and removal of contaminants from com- pound semiconductor fab operations require some familiarity with the aqueous chemistry of of III-V elements (i.e., GaAs) on the periodic table. This knowledge will enable foundries and fabs to comply with local discharge limits and EPA regulations governing the semiconductor industry. Waste streams from these operations have come under increased scrutiny by local and federal regulatory agencies, especially in light of the current debate about limits for arsenic.