Handling and filtration evaluation of a colloidal silica CMP slurry

摘要

Maintaining CMP slurry quality is critical for low detectivity in complex CMP processes. Consequently, slurry "health" parameters are key considerations in distribution and dispensing systems. Accelerated aging and handling evaluations were conducted to determine the effects of extensive slurry handling using a vacuum-pressure dispense system and bellows pump for bulk delivery. Filtration tests also were conducted with the extensively handled colloidal silica-based slurry to develop recommendations for point-of-use and global distribution-loop filtration in production environments.