Advancing the standards for ultrahigh-purity fluoropolymer components

摘要

New wet processes for semiconductor manufacturing require higher standards for purity and improved design and materials for fluid system components. Semiconductor equipment makers and tool integrators are calling for longer life cycles, easier maintenance, resistance to permeation, and reduced particle shedding in valves and other system components. The four-year-old SEMI F57-0301 standard provides a baseline for purity, but third-party tests underscore the need for more stringent industry standards to address new wet processes and materials requirements. Methodologies and conclusions discussed in this article are applicable not only to valves but also to many other liquid system components, such as flow meters, filter housings, and regulators.