New industry Roadmap charts touqh challenges

摘要

Solid State Technology has been working with the leaders of the various technical working groups of the 2003 International Technology Roadmap for Semiconductors (ITRS) to outline highlights and crucial changes in the new document. A discussion of some of those changes involving process integration, frontend processing, lithography, interconnect, materials, and high aspect ratio inspection is presented here. For a roadmap overview by chairmen Paolo Gargini and Robert Doering, see p. 72.