There really is a litho wall

摘要

Optical lithography has transcended so many limits set by the promoters of next-generation lithographies that much of the industry acts as if it will live forever. Long ago, I first became fascinated with litho when Grant Willson, currently professor of chemical engineering at the U. of Texas, Austin, told our group at IBM that the powers-that-be had decreed that optics would die at one micron, to be replaced by direct-write e-beam and X-ray.