Semiconductor applications using short-pulsed UV lasers

摘要

Excimer and UV diode-pumped solid-state (DPSS) lasers can be used by the semiconductor industry, and others, in applications that cannot be performed by mechanical, chemical, or other laser fabrication methods. These lasers also produce better results than other methods in micromachining, dicing and scribing, and via drilling. In this column, some of the most important applications of excimer and UV DPSS lasers will be reviewed to illustrate how they can have a significant impact on the development and productivity of the semiconductor industry.