The essentials of single-wafer wet processing: selectivity and partnering

摘要

Chipmakers are migrating to single-wafer tools, driven by the need for highly reliable processes that can meet the stringent performance and throughput requirements of state-of-the-art fabs. The strategy is not just a function of the toolset, but rather of the overall process used. This means that the right chemistry, or combination of chemistries, is necessary to avoid the materials and yield losses that increasingly accompany batch processing, particularly wet-bench tools.