New uses of IC technology will enable better opportunities for optical lithography

摘要

Remember our roots. Sixty years ago in 1947, the transistor was invented at Bell Labs. in 1961, college courses were still teaching vacuum tube technology. By 1963, William Shockley was making individual bipolar transistors at Transitron in Boston. He asked for masks from the David W. Mann Company, which I joined in 1966. At that point, the integrated circuit (IC) had just been invented. One IC had four active devices. Emulsion masks were contact-printed onto 0.75-m. waters. The smallest features were 25μm.