SURFmonitor breaking waves of defects

摘要

KLA-Tencor's Surfscan SP2~(XP) was released earlier this year (SST April 2007, Tech News, p.29) initially to inspect defects on bare wafers. Now the company has added a SURFmonitor haze analysis capability, an add-on option to either a SP2 or SP2~(XP) darkfield/brightfield laser scattering surface inspection system, with new image processing algorithms to allow for applications in IC manufacturing.