Enhanced process metrology using plasma parameters in FDC

摘要

Automotive device manufacturers have to meet increasing levels of quality as their customers demand a zero defects quality level. However, quality and reliability at reasonable costs require excellent process control, particularly for plasma etch and deposition. Production tools provide a large amount of data, but most of them characterize the tool hardware instead of the process. Using additional sensors and an efficient data management system provides a significant benefit and closes the gap between process and tool data.