ASML fulfills 'holistic litho' plan with two tools, custom packages

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ASML fulfills 'holistic litho' plan with two tools, custom packages

机译：ASML通过两种工具（自定义程序包）来实现“整体光刻”计划

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Citing the embodiment of its concept of "holistic lithography," ASML has unwrapped two hardware/software components to help chipmakers improve lithography process windows while avoiding costly and timely steps and maintenance downtime.

机译：ASML以其“整体光刻”概念的体现为例，已经展开了两个硬件/软件组件的包装，以帮助芯片制造商改善光刻工艺窗口，同时避免昂贵且及时的步骤和维护停机时间。

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《Solid state technology》 |2009年第9期|6-6|共1页
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
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正文语种 eng
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2. ASML "double-dips" with updated litho tool [J] . M David Levenson Solid State Technology . 2009,第1期

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3. Asml 'double-dips' With Updated Litho Tool [J] . Solid state technology . 2009,第1期

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4. Holistic approach using accuracy of diffraction-based integrated metrology to improve on-product performance, reduce cycle time and cost at litho [C] . Kaustuve Bhattacharyya, Arie den Boef, Martin Jak, Conference on metrology, inspection, and process control for microlithography XXIX . 2015

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ASML fulfills 'holistic litho' plan with two tools, custom packages

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