450mm metrology stage

摘要

This 450mm R/Theta/Zrnpolar coordinate stagernconsisting of a linear, rotary,rnand Z axis offers a compactrnfootprint for inspecting 450mm wafers.rnA bridge configuration provides a stable platform forrnmounting a variety of metrology systems. Additional featuresrninclude a built-in prealigner, independent load-unload stations,rna low-contact vacuum chuck (1.7% of a 450mm wafer), andrnan option for a lift pin mechanism for measuring wafer bow.