A blueprint for enterprise-wide deployment of advanced process control

摘要

Advanced process control (APC), which includes both run-to-run (R2R) control and fault detection and classification (FDC), is now a required component in all fabs, providing process improvement and waste reduction. A major global semiconductor manufacturer is currently involved in an enterprise-level deployment of APC. Execution to specific technical and business models across the enterprise has resulted in a high ROI APC deployment with results including 50% improvement in process capability for key processes, and detection of key faults impacting productivity, such as etch arcing. The deployment process developed is proposed as a cost-effective approach for others to use in enterprise-wide APC deployment.