An automated robot teaching method improves process control

摘要

Legacy robot teaching methods contribute to increased cycle time, increase the risk of particle generation and contamination, and introduce variation into the task because of differences in skill, motivation and training. An automated robot-teaching method was evaluated by a 300mm European fab manager and his team; they were able to reduce the time to conduct preventive maintenance, mean-time-to-repair (MTTR), and downtime. The thin-film group at a 300mm European fab wanted to reduce the tool and production downtime resulting from a time-consuming metrology process that called for multiple technicians to vent and dismantle Endura/Centura tool sets and employ manual methods to teach wafer-transfer coordinates to robots. The process took -24 hours.