Production metrology of advanced LED structures using high-resolution X-ray diffraction

摘要

In the future, the production of advanced LED structures is expected to grow more rapidly with the growth in energy efficient, long-lifetime luminaries for general lighting applications. In this article, we will outline the most important measurement capabilities that allow the rapid and reliable control of the LED production process using HRXRD, and the latest advances in HRXRD technology to allow true inline monitoring.