Novellus launches SOLA xT UVTP system for sub-45nm HVM

摘要

Novellus Systems next-generation ultra-violet thermal processing (UVTP) system, the SOLA xT, targets the manufacture of advanced logic devices at 45nm and below with a proprietary UVTP treatment process that modifies the physical characteristics of a previously-deposited film through exposure to ultraviolet light and heat. The new system has on-board UV monitoring and a customizable optics assembly and is designed to be extendible over multiple device generations. The first SOLA xT system will be shipped to UMC's Fab 12i in Singapore.