Deep UV excimer laser mirrors

摘要

Newport Corp. introduced long-lived deep ultraviolet (UV) excimer laser mirrors with projected lifetimes greater than 30 billion pulses when used in the proper photocontamination controlled environment. The advanced new mirrors feature all dielectric high reflector coatings to minimize absorption and maximize reflected energy at 193nm. The high energy laser mirrors are designed with excimer- grade UV-fused silica substrates which are polished to better than λ/10 flatness to preserve wavefront quality and maintain excellent stability. All coating and testing are done in a special photocontamination controlled deep UV deanroom that has been qualified to 193nm standards.