How SEMI Standard E175 is saving energy and cutting costs

Shelley Gerald; Czerniak Mike; Crispieri Gino; Rostan Martin

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How SEMI Standard E175 is saving energy and cutting costs

机译：SEMI标准E175如何节省能源并降低成本

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来源
《Solid state technology》 |2017年第4期|35-37|共3页
作者
Shelley Gerald; Czerniak Mike; Crispieri Gino; Rostan Martin;
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作者单位

Edwards, Commun & Control, Crawley, England|E175 Task Force, Roughing Pump Working Grp, Crawley, England;

Edwardsm, Crawley, England|E167, Crawley, England|E175, Crawley, England;

E175, SEMATECH ISMI, Crawley, England;

EtherCAT Technol Grp, Nurnberg, Germany;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类
关键词
入库时间 2022-08-18 01:34:25

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How SEMI Standard E175 is saving energy and cutting costs

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