Inside the first 450mm printed wafer

摘要

The company used its SMS-NIL technology (aka soft molecular-scale nanoimprint lithography) to imprint the wafer. "It was beneficial because it's very compliant and could also accommodate the limited wafer quality available at 450mm at that point in time," said Wimplinger. The company imprinted 35nm lines and spaces, but has demonstrated "capability down to 12.5nm lines and spaces on smaller substrates," he noted.