On the preparation and micro structure of Y-doped BaCeO_3 perovskite thin films

摘要

Thin films of the Y-doped stoichiometric high temperature protonic conductor barium cerate, BaCeO_3, were deposited on single-crystalline MgO (001) substrates by RF-magnetron sputtering techniques. The films were characterized by X-ray diffraction, Rutherford backscattering spectroscopy and transmission electron microscopy. It was found that the micro-structure and the phase purity of the films depend strongly on the substrate temperature. The films deposited at the optimum substrate temperature of 550℃ are polycrystalline but strongly textured with the {110} planes of the pseudo-cubic perovskite unit cell parallel or close to the substrate surface.