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A novel integrable surface acoustic wave notch filter

机译:新型可积分表面声波陷波滤波器

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摘要

Although surface acoustic wave (SAW) notch filter was investigated in the past, the structures of these devices often needed the extra lumped-element such as resistance R, capacitance C, and inductance L so that the devices are complex and integrated hardly. From this, we offer a simple kind of the planar structure to the novel SAW notch filters that have smaller size and can be fabricated easily. We adopt the SAW and the interdigital transducer's (IDT's) theory to fabricate the SAW notch filter. In this paper, we use an IDT finger width 8 μm with conventional photolithography process, liftoff technique, and IDT electrode to fabricate on 128° rotated YX-cut lithium niobate (LiNbO_3). Finally, we get the frequency responses of the novel SAW notch filter with the center frequency 113.4 MHz, the 3 dB bandwidth 0.36%, and the insertion loss S_(21) = -10.583 dB.
机译:尽管过去对表面声波陷波滤波器进行了研究,但这些器件的结构通常需要额外的集总元件,例如电阻R,电容C和电感L,因此器件复杂且难以集成。由此,我们为新颖的SAW陷波滤波器提供了一种简单的平面结构,该滤波器尺寸较小且易于制造。我们采用SAW和叉指换能器(IDT)理论来制造SAW陷波滤波器。在本文中,我们通过传统的光刻工艺,剥离技术和IDT电极,使用宽度为8μm的IDT指状电极,在128°旋转的YX切割铌酸锂(LiNbO_3)上进行制造。最后,我们得到了新型SAW陷波滤波器的频率响应,其中心频率为113.4 MHz,3 dB带宽为0.36%,插入损耗S_(21)= -10.583 dB。

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