Effective-channel-length extraction for double-diffused MOSFETs

摘要

A new method to extract the effective channel length of a double-diffused MOSFET (DMOSFET) is proposed. This method models the DMOSFET by two MOSFETs serially connected each other, and extracts their channel lengths by fitting the effective channel length versus gate-voltage relation calculated by the present model to the measured one. The effective channel lengths extracted by this method is verified to be useful.