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Measurement of bulk and rear recombination components and application to solar cells with an Al back layer

机译:本体和背面复合成分的测量及其在具有Al背层的太阳能电池中的应用

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摘要

A procedure to discriminate the recombination in the bulk and highly doped layers is presented in this paper. It is based on the photoconductance decay technique. First the effective lifetime is measured for the whole sample, and then the recombinant surfaces are chemically etched and the bulk lifetime is measured by itself. This method has been applied to determine the recombination associated to Al diffusion in silicon wafers after several drive-in processes. Best values are 2000 cm/s on 1.6 竎m p-type wafers, obtained after driving 3 μm Al at 1050℃ for 3 h in a conventional furnace. After some processes they have also been measured effective recombination velocities over 10,000 cm/s. An insufficient BSF effect cannot explain such high values in those cases, and other questions like an insufficient gettering of impurities must be considered.
机译:本文提出了一种区分体层和高掺杂层中重组的方法。它基于光电导衰减技术。首先测量整个样品的有效寿命,然后化学蚀刻重组表面,并通过自身测量整体寿命。该方法已被应用来确定在几次压入过程之后与硅片中的铝扩散相关的复合。最佳值是在1.6μmp型晶片上以2000 cm / s的速度获得,该晶片是在常规炉中于1050℃驱动3μmAl 3小时后获得的。经过一些过程后,还测量了它们在10,000 cm / s以上的有效重组速度。在这些情况下,BSF效应不足不能解释这么高的值,必须考虑其他问题,例如杂质吸收不充分。

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