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Mobility in graphene double gate field effect transistors

机译:石墨烯双栅极场效应晶体管的迁移率

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In this work, double-gated field effect transistors manufactured from monolayer graphene are investigated. Conventional top-down CMOS-compatible processes are applied except for graphene deposition by manual exfoliation. Carrier mobilities in single- and double-gated graphene field effect transistors are compared. Even in double-gated graphene FETs, the carrier mobility exceeds the universal mobility of silicon over nearly the entire measured range. At comparable dimensions, reported mobilities for ultra-thin body silicon-on-insulator MOSFETs cannot compete with graphene FET values.
机译:在这项工作中,研究了由单层石墨烯制造的双栅场效应晶体管。除了通过手动剥落进行石墨烯沉积外,均采用常规的自上而下与CMOS兼容的工艺。比较了单栅极和双栅极石墨烯场效应晶体管中的载流子迁移率。即使在双栅极石墨烯FET中,在几乎整个测量范围内,载流子迁移率也超过了硅的通用迁移率。在可比较的尺寸下,报道的超薄绝缘体上硅MOSFET的迁移率无法与石墨烯FET值竞争。

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