A Charge-based Compact Model For Predicting The Current-voltage And Capacitance-voltage Characteristics Of Heavily Doped Cylindrical Surrounding-gate Mosfets

摘要

This paper presents a charge-based compact model for predicting the current-voltage and capacitance-voltage characteristics of heavily doped long-channel cylindrical surrounding-gate (SRG) MOSFETs. Starting from Poisson's equation with fixed charge and inversion charge terms, a closed-form equation of inversion charge is obtained with the full-depletion approximation. Substituting this inversion charge expression into Pao-Sah's dual integral, a drain current expression with concise form is derived. Based on the Ward-Dutton linear-charge-partition method and the current continuity principle, all trans-capacitances are obtained analytically. The developed model is valid in all operation regions from the sub-threshold to strong inversion and from the linear to the saturation region without any smooth function. The model predictions have been extensively compared with 3D numerical simulations and a good agreement is observed in most of the operation regions with a wide range of geometrical parameters.