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Study of current collapse by quiescent-bias-stresses in rf-plasma assisted MBE grown AlGaN/GaN high-electron-mobility transistors

机译:射频等离子体辅助MBE生长的AlGaN / GaN高电子迁移率晶体管中的静态偏置应力引起的电流崩溃研究

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摘要

Studies on the influence of quiescent-gate (V_(gs0)) and quiescent-drain (V_(ds0)) bias stresses in rf-plasma MBE grown A/GaN/GaN high-electron-mobility transistors (HEMTs) were performed. The increase of drain current (I_D) collapse by quiescent-bias-stress in AlGaN/GaN HEMTs were observed using pulsed (pulse width = 200 ns; pulse period-1 ms) I_(DS)-V_(DS) characteristics. The Si_3N_4 passivation suppressed about 80% Z_D collapse in quiescent-bias-point stressed HEMTs. The remaining 20% I_D collapse were not suppressed which may be coming from buffer-related traps. However, more than 10% of I_D collapse suppression was observed on un-stressed or fresh-HEMTs. Similarly, improved cut-off frequency (f_τ), maximum oscillation frequency (f_(max)) and device output power (P_(out)) values were also observed on the un-stressed HEMTs. The Si_3N_4 passivation completely suppressed the I_D collapse in un-stressed or fresh-HEMTs which leads to 70% improvement in fr and 60% improvement in the device P_(out). The Si_3N_4 passivation did not completely suppress I_D collapse in the quiescent-bias stressed-HEMTs. This may be due to the generation of additional surface-related traps in the HEMTs by quiescent-bias-stresses.
机译:对射频等离子体MBE生长的A / GaN / GaN高电子迁移率晶体管(HEMT)中的静态栅极(V_(gs0))和静态漏极(V_(ds0))偏应力的影响进行了研究。使用脉冲(脉冲宽度= 200 ns;脉冲周期1 ms)I_(DS)-V_(DS)特性观察到AlGaN / GaN HEMT中由于静态偏置应力而导致的漏电流(I_D)崩溃的增加。 Si_3N_4钝化抑制了静态偏置点应力HEMT中约80%的Z_D塌陷。其余20%的I_D崩溃没有被抑制,这可能来自与缓冲区相关的陷阱。但是,在无压力或新鲜的HEMT上观察到I_D塌陷抑制超过10%。同样,在无应力的HEMT上也观察到了提高的截止频率(f_τ),最大振荡频率(f_(max))和器件输出功率(P_(out))值。 Si_3N_4钝化完全抑制了无应力或新鲜HEMT中的I_D崩溃,从而导致fr改善了70%,器件P_(out)改善了60%。 Si_3N_4钝化不能完全抑制静态偏应力HEMT中的I_D塌陷。这可能是由于静态偏置应力在HEMT中生成了其他与表面相关的陷阱。

著录项

  • 来源
    《Solid-State Electronics》 |2010年第11期|p.1430-1433|共4页
  • 作者单位

    MMIC Design Center, Temasek Laboratories@NTU, Nanyang Technological University, 50 Nanyang Drive, Research Techno Plaza, Singapore 637553, Singapore;

    rnMMIC Design Center, Temasek Laboratories@NTU, Nanyang Technological University, 50 Nanyang Drive, Research Techno Plaza, Singapore 637553, Singapore Division of Microelectronics, School of IEEE, Nanyang Technological University, Singapore 639798, Singapore;

    rnMMIC Design Center, Temasek Laboratories@NTU, Nanyang Technological University, 50 Nanyang Drive, Research Techno Plaza, Singapore 637553, Singapore Division of Microelectronics, School of IEEE, Nanyang Technological University, Singapore 639798, Singapore;

    rnMMIC Design Center, Temasek Laboratories@NTU, Nanyang Technological University, 50 Nanyang Drive, Research Techno Plaza, Singapore 637553, Singapore Division of Microelectronics, School of IEEE, Nanyang Technological University, Singapore 639798, Singapore;

    rnDivision of Microelectronics, School of IEEE, Nanyang Technological University, Singapore 639798, Singapore;

    rnDivision of Microelectronics, School of IEEE, Nanyang Technological University, Singapore 639798, Singapore;

    rnDivision of Microelectronics, School of IEEE, Nanyang Technological University, Singapore 639798, Singapore;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    AlGaN/GaN; HEMT; quiescent-gate; quiescent-drain; Si_3N_4 passivation; rf-plasma assisted MBE;

    机译:AlGaN / GaN;HEMT;静态门静态排水Si_3N_4钝化;射频血浆辅助MBE;
  • 入库时间 2022-08-18 01:34:55

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