A unified short-channel compact model for cylindrical surrounding-gate MOSFET

摘要

For the first time, a continuous and explicit model valid in all operating regions, for undoped short-channel cylindrical gate-all-around (GAA) MOSFETs, is presented in this study. From a two-dimensional analysis, the threshold voltage roll-off, the drain-induced barrier lowering (DIBL) and the subthreshold swing are explicitly modeled. Short-channel effects are then implemented into a continuous drain-current model based on an effective surface potential approach using the gradual channel approximation. Improving the model behavior in the saturation operating region by accounting the channel pinch-off displacement, channel length modulation is studied and implemented as well. Analytical results are compared to TCAD-Atlas numerical simulations and validate the short-channel model in all operating modes making it suitable for circuit design simulations.