Modeling the geometric effects on programming characteristics for the TANOS device by developing a 3D self-consistent simulation

摘要

This paper reports a study on the programming characteristics of the TANOS (Ti gate - Al_2O_3-Si_3N_4-SiO_2-Si) device using a 3-dimensional self-consistent numerical simulation. The STI (Shallow Trench lsolation) structure is considered in TANOS device simulation. The program characteristics are investigated in various active space and gate dimensions (width and channel length) using numerical simulation. It is found from the simulation that the STI effect becomes more important as the device size is scaled down. Since the STI effect is dependent on the channel width, length, and STI width, the framework of 3D simulation is crucial for scaled TANOS device design.