Tunable-Sensitivity flexible pressure sensor based on graphene transparent electrode

摘要

Tunable-sensitivity and flexibility are considered as two crucial characteristics for future pressure sensors or electronic skins. By the theoretical calculation model, we simulated the relationship curve between the sensitivity and PDMS pyramids with different spacings, and found that the spacing of pyramids is a main factor to affect the sensitivity of the capacitance pressure sensor. Furthermore, we fabricated the capacitance pressure sensors using graphene electrodes and the PDMS pyramid dielectric layers with different spacings. The measurement data were consistent with the simulation results that the sensitivity increases with the spacing of pyramids. In addition, graphene electrode exhibits prefect flexibility and reliability, while the ITO electrode would be destroyed rapidly after bending. These graphene pressure sensors exhibit the potential in the application in the wearable products for monitoring breath, pulse, and other physiological signals.