机译:基于飞电容的141-
Univ Freiburg, Dept Microsyst Engn, Fritz Huettinger Chair Microelect, IMTEK, D-79110 Freiburg, Germany;
Hahn Schickard, D-78052 Villingen Schwenningen, Germany|Northrop Grumman Litef, D-79115 Freiburg, Germany;
Univ Freiburg, Dept Microsyst Engn, Fritz Huettinger Chair Microelect, IMTEK, D-79110 Freiburg, Germany;
Univ Freiburg, Dept Microsyst Engn, Fritz Huettinger Chair Microelect, IMTEK, D-79110 Freiburg, Germany;
Univ Freiburg, Dept Microsyst Engn, Fritz Huettinger Chair Microelect, IMTEK, D-79110 Freiburg, Germany|Hahn Schickard, D-78052 Villingen Schwenningen, Germany;
Drive; flying capacitor; gyroscope; high voltage (HV); low power; microelectromechanical systems (MEMS);
机译:Sub-150-
机译:基于灵敏度图的MIM电容器中
机译:被动地
机译:MEMS振动陀螺仪的高压接口电路
机译:平面外单环解耦CMOS-MEMS陀螺仪的基于寄生不敏感开关电容感应电路的失调抵消
机译:Composite