Promotion Effect of Iodine Treatment on Carbonization of Polymer Films for MEMS Chips

摘要

In this paper we describe the promotion effect of iodine treatment on the carbonization of polymers at a low pyrolysis temperature for micro electromechanical systems (MEMS) and micro total analysis systems (μTAS) applications. A higher pyrolysis temperature contributes to further carbonization. There is, however, a restriction of process temperature when applying pyrolyzed polymers to MEMS chips. We propose a unique technique for synthesizing pyrolyzed polymers to overcome this restriction. Through electrical and structural characterizations, it is confirmed that iodine treatment promotes further carbonization. The resistivity of a parylene C film was 2.0 after 12 h of iodine treatment followed by pyrolysis at 650℃, but only 3.4 × 10~3 without iodine treatment. Furthermore, we present the potential of the proposed technique for electrochemical electrode applications.