Electronic devices from diamond-like carbon

摘要

This paper reviews the work carried out over the past few years on the application of diamond-like carbon (DLC) materials to electronic devices. The use of such materials is still in its infancy due to their high defect state density and associated low mobilities. To date, the major effort in the electronic field has been in their attempted use as cold cathode field emitters where their low threshold field has attracted much attention. However, attempts have also been made to produce metal semiconductor metal structures, diodes, a-C/c-Si heterostructures and thin film transistors with varying degrees of success. A brief review of work carried out on the use of DLCs in solar cell manufacture will also be presented but it seems at this early stage in their development that the most promising area for future development will be in the field of microelectromechanical structures where their friction, stiction and wear properties make them prime candidates for use in moving mechanical assemblies.